Dr.-Ing. Christian Wölfel
Postdoc
Adresse:
Ruhr-Universität Bochum
Lehrstuhl für Automatisierungstechnik und Prozessinformatik
Fakultät für Elektrotechnik und Informationstechnik
Postfach ID 14
Universitätsstrasse 150
D-44780 Bochum
Raum:
Gebäude ID, Etage 2, Raum 527
Telefon:
++49/234 32-23105
E-Mail:
Forschung:
Modeling and control of plasma-based surface treatment
Vorlesungsbetreuung:
Wintersemester:
- Automatisierungstechnik (Automatic Control)
- Systemdynamik und Reglerentwurf (System dynamics and control design)
- Master-Projekt "Systemstechnik", (Master project "Systems engineering")
Sommersemester:
- Mehrgrößensysteme und digitale Regelung (Control of MIMO systems and digital control)
- Prozessautomatisierung (Process automation)
- Master-Seminar Moderne Verfahren der Regelungstechnik (Master seminar "Modern methods of control engineering")
- Master-Praktikum "Automatisierungstechnik" (Master practical course "Automatic control")
- Master-Projekt "Systemtechnik", (Master project "Systems engineering")
Veröffentlichungen:
2023
- D. Eremin, D. Engel, D. Krüger, S. Wilczek, B. Berger, M. Oberberg, C. Wölfel, A. Smolyakov, J. Lunze,
P. Awakowicz, J. Schulze and R.P. Brinkmann
Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode
Plasma Sources Science and Technology, Vol. 32, No. 4 (2023).
https://iopscience.iop.org/article/10.1088/1361-6595/acc481 - D. Eremin, B. Berger, D. Engel, J. Kallähn, K. Köhn, D. Krüger, L. Xu, M. Oberberg, C. Wölfel, J. Lunze,
P. Awakowicz, J. Schulze and R.P. Brinkmann
Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied
via a 2d3v particle-in-cell/Monte Carlo code
Plasma Sources Science and Technology, Vol. 32, No. 4 (2023).
https://iopscience.iop.org/article/10.1088/1361-6595/acc47f/meta - B. Berger, D. Eremin, M. Oberberg, D. Engel, C. Wölfel, Q.-Z. Zhang, P. Awakowicz, J. Lunze, R.P. Brinkmann
and J. Schulze:
Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations
of power absorption dynamics to simulation results
Plasma Sources Science and Technology, Vol. 32, No. 4 (2023).
https://iopscience.iop.org/article/10.1088/1361-6595/acc480 - F. Schneider, C. Wölfel:
Robust interval observer for substrate state estimation of nonlinear reactive sputter processes
Proc. of the 2023 IEEE Conference on Control Technology and Applications (CCTA), Bridgetown, Barbados, 2023. - F. Schneider, C. Wölfel:
Observability analysis and substrate state estimation of nonlinear reactive sputter processes
Proc. of the 24th IEEE International Conference on Process Control (PC), Strbske Pleso, Slovakia, 2023.
DOI: https://doi.org/10.1109/PC58330.2023.10217785 - C. Wölfel:
Multivariable Modeling and Feedback Control of Reactive Sputtering
Proc. of the 2023 IFAC World Congress, Yokohama, Japan, 2023. - C. Wölfel:
Model predictive control of sputter processes
Proc. of the 2023 American Control Conference (ACC) San Diego, CA, USA, 2023.
https://doi.org/10.23919/ACC55779.2023.10156155
2022
- J. Roggendorf, B. Berger, D. Eremin, M. Oberberg, D. Engel, C. Wölfel, Q.-Z. Zhang, P. Awakowicz, J.
Lunze, J. Schulze:
Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes,
Plasma Sources Science and Technology (2022).
2021
- C. Wölfel, M. Oberberg, B. Berger, D. Engel, R.P. Brinkmann, J. Schulze, P. Awakowicz, J. Lunze:
Control-oriented plasma modeling and controller design for reactive sputtering
IFAC Journal of Systems and Control (2021) - C. Wölfel:
Control-oriented modeling and feedback control of reactive sputtering: presented by the running example of depositing aluminum oxide by means of an rf magnetron ccp set-up
BoD – Books on Demand, 1. Edition, ISBN: 978-3752671056 (2021)
2020
- M. Oberberg, B. Berger, M. Buschheuer, D. Engel, C. Wölfel, D. Eremin, J. Lunze, R.P. Brinkmann,
P. Awakowicz, J. Schulze:
The Magnetic Asymmetry Effect in geometrically asymmetric capacitively coupled radio frequency discharges
operated in Ar/O2
Plasma Sources Science and Technology (2020)
https://doi.org/10.1088/1361-6595/ab9b31 - C. Wölfel, M. Oberberg, D. Bockhorn, P. Awakowicz, J. Lunze:
Electron Plasma Frequency Feedback Control for Reactive RF Magnetron Sputtering Processes
Society of Vacuum Coaters Bulletin / Fall-Winter (2020)
2019
- C. Wölfel, M. Oberberg, P. Awakowicz, J. Lunze:
Plasma State Control of Reactive Sputter Processes
Proc. of the 6th International Conference of Control, Dynamic Systems, and Robotics,Ottawa, Canada, 2019
https:\\doi.org\10.11159/cdsr19.107 - C. Wölfel, M. Oberberg, B. Bergner, D. Engel, R.P. Brinkmann, P. Awakowicz, J. Lunze, J. Schulze:
The Multipole Resonance Probe-based controller: A technology to investigate plasma-based deposition
Journal of Instrumentation (2019)
https:\\doi.org\10.1088/1748-0221/14/10/P10007 . -
M. Oberberg, D. Engel, B. Berger, C. Wölfel, D. Eremin, J. Lunze, R.P.
Brinkmann, P. Awakowicz, J. Schulze:
Magnetic control of non-linear electron resonance heating in a capacitively coupled radio frequency discharge
Plasma Sources Science and Technology (2019),
https:\\doi.org\10.1088/1361-6595/ab53a0 - C. Wölfel, D. Bockhorn, P. Awakowicz, J. Lunze:
Model approximation and stabilization of reactive sputter processes
Journal of Process Control, Volume 83, pp.: 121-128, 2019,
https://doi.org/10.1016/j.jprocont.2018.06.009
2018
- C. Wölfel, J. Lunze:
Stabilisierung reaktiver Sputterprozesse: Modellbildung - Reglerentwurf - Experimentelle Erprobung
52. Regelungstechnisches Kolloquium in Boppard, 2018. - M. Oberberg, S. Ries, C. Wölfel, J. Harhausen, D. Pohle, C. Schulz, O. Schmidt, W. Dobrygin, I. Rolfes,
R.P. Brinkmann, P. Awakowicz:
The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes
82nd Annual Meeting of the DPG, Erlangen-Nürnberg, 2018. - C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze:
Sputter processes: Neural network based modeling and control
1st International Conference on Data-Driven Plasma Science, York, 2018. - M. Oberberg, C. Wölfel, D. Bockhorn, J. Lunze, P. Awakowicz:
The Multipole Resonance Probe: A powerful sensor for plasma process monitoring and control
1st International Conference on Data-Driven Plasma Science, York, 2018. - C. Wölfel, M. Oberberg, D. Bockhorn, P. Awakowicz, J. Lunze:
Electron Plasma Frequency Feedback Control for Reactive RF Magnetron Sputtering Processes
61st Annual Technical Conference Proceedings, Orlando, USA, 2018.
2017
- D. Engel, D. Krüger, C. Wölfel, M. Oberberg, J. Lunze, P. Awakowicz, R.P. Brinkmann:
Efficient model for active control of radio frequency magnetron sputtering
18. Fachtagung für Plasmatechnologie, Göttingen, 2017. - C. Wölfel, P. Awakowicz, J. Lunze:
Model reduction and identification of nonlinear reactive sputter processes
Proc. of the 20th IFAC World Congress, pp. 14292-14298, Toulouse, France, 2017.
- C. Wölfel, P. Awakowicz, J. Lunze:
Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes
Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017. - C. Wölfel, P. Awakowicz, J. Lunze:
Robust high-gain control of nonlinear reactive sputter processes
Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017. - C. Wölfel, R.P. Brinkmann, P. Awakowicz, J. Lunze:
Ein Ansatz zur Modellierung und Regelung reaktiver Zerstäubungsprozesse
GMA-FA 1.30 Modellbildung, Identifikation und Simulation in der Automatisierungstechnik, Anif, 2017. - C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze:
Model identification of nonlinear sputter processes
Proc. of the 17th International Conference on Control, Automation and Systems, pp. 182-187, Jeju, Korea, 2017. - C. Wölfel, R.P. Brinkmann , P. Awakowicz, J. Lunze:
Control-oriented modeling and stabilization of reactive sputter processes
16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017. - C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze:
Neural network based linearization and control of sputter processes
Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017. - M. Oberberg, M. Fiebrandt, S. Ries, C. Wölfel, P. Awakowicz:
The application of the multipole resonance probe to industrially relevant processes
70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017.
2016
- D. Engel, D. Krüger, C. Wölfel, M. Oberberg, J. Lunze, P. Awakowicz, R.P. Brinkmann:
Global model for active control of capacitive radio frequency magnetron discharges
69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.
2015
- C. Wölfel, M. Oberberg, D. Krüger, J. Lunze, R.P. Brinkmann, P. Awakowicz:
Nutzung von Plasmadiagnostik zur Regelung eines reaktiven Sputterprozesses
23. Dresdner Vakuumtechnische Kolloquium (NDVaK) Beschichtung und Modifizierung von Kunststoffoberflächen, Dresden, 2015. - C. Wölfel, M. Oberberg, J. Lunze, P. Awakowicz:
Control orientated modeling and analysis of a reactive (O2) sputter (Ti) process
WELTPP-18, Kerkrade, 2015.
Betreute Abschlussarbeiten:
2023:
- Anwendung einer Methode zur strukturellen Reduktion von Plasmanetzen
Timo Habersang, Masterarbeit, März 2023. - Identifikationsalgorithmus zur Bestimmung der Oberflächenparameter reaktiver Zerstäubungsprozesse
Nora Lindner, Masterarbeit, März 2023.
2022:
- Beobachterkonzept für die Rekonstruktion des Substratzustandes reaktiver Zerstäubungsprozesse
Fabian Schneider, Masterarbeit, Mai 2022. - Kooperative Regelung von Linearmotoren
DilaraSerif Oglu, Masterarbeit, Dezember 2022. - Einrichtung und Modellierung eines Versuchsstandes zur Krängungsregelung
Darko Divkovic, Bachelorarbeit, September 2022.
2017:
- Identifikation eines Plasmaniederdruckreaktors mittels Neuronaler Netze
Sven Kockmann, Masterarbeit, März 2017. - Erprobung eines Ansatzes zur linearen Regelung von reaktiven Zerstäubungsprozessen
Engin Polat, Masterarbeit, Mai 2017. - Stabilisierung reaktiver Sputterprozesse mittels einer multipolresonanz- und Lambdasonde
Dirk Bockhorn, Masterarbeit, Oktober 2017.
2016:
- Identifikation und Parametrierung eines Präzisions-Massenflussreglers
Sebastian Middeke, Bachelorarbeit, August 2016.
2015:
- Identifikation eines Vakuumsystems zur plasmagetriebenen Abscheidung von Dünnfilmen
Hamza Bouroum, Bachelorarbeit, Oktober 2015.